Equipment List
> Spare parts > Equipment List
| CATEGORY | Serial No. | MAKER | MODEL | Process | SIZE(mm) | VINTAGE |
|---|---|---|---|---|---|---|
| Furnace | T2DC1-10673-1 | KE | DJ-853V J1 | HTO | 8" | 1996.6 |
| Furnace | A00009550077 | TEL | a-808SC  |
NIT | 8 | 1995.5 |
| Furnace | A0U000730009 | TEL | a-808SC | TEOS | 8" | 2007.4 |
| Furnace | A00009785405 | TEL | a-808SC | TEOS | 8" | ? |
| RTP | 99040478 | MATTSON | AST2800 | RTP | 8" | 1999 |
| Furnace | T2DC3-11446-3 | KE | DD-853V J2 | PYRO | 8" | 2003.05 |
| Furnace | M00000815026 | TEL | a-8SE-Z |
PYRO | 8 | 2003.1 |
| Furnace | T2DC3-11300-1 | KE | DD-853V J2 |
PYRO | 8 | 2002.02 |
| Furnace | M00000325029 | TEL | a-8SE-E |
PYRO | 8 | 2003.2 |
| Furnace | N000001Z0006 | TEL | a-8SE-Z |
PYRO | 8 | 2001.12 |
| Furnace | M000099Z5240 | TEL | a-8SE-Z |
PYRO | 8 | 2000.2 |
| Furnace | T2DD3-16022-1 | KE | DD-853V J2 | D2 Anneal | 8" | 2000.12 |
| Furnace | DD3-15449-1 | KE | DD-853V J1 | H2 Anneal | 8" | 1997.9 |
| Furnace | DD3-15296-1 | KE | DD-853V J1 | H2 Anneal | 8" | 1996.7 |
| Furnace | DC1-01204-1 | KE | DJ-833V | SION | 8" | 1996.4 |
